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Scheme Overview

The AMC monitoring solutions for the semiconductor industry focus on precise monitoring of Airborne Molecular Contaminants (AMC) in clean environments. By deploying advanced sensor technologies, such as chemical ionization mass spectrometers and gas chromatographs, in key areas like wafer manufacturing and packaging testing, we can real-time detect the components and concentrations of acids, bases, and organic compounds. The data is collected and sent to a monitoring platform, where professional software analyzes the data to make adjustments to purification systems, process optimization, and chip yield. This ensures that the semiconductor production environment is ultra-clean and stable.

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Strength of Solution

Monitoring precision

Utilize highly sensitive sensors to accurately capture trace AMC information.

Technological advancement

Adopt cutting-edge monitoring technology to adapt to complex semiconductor processes.

Scientific placement

Position monitoring points at key locations within the production process to ensure comprehensive coverage of risk areas.

Data practicality

Analyze data to aid in process optimization and make informed decisions regarding environmental control.

System integration

Integrate monitoring, transmission, and analysis modules to enable efficient collaborative operation.

Composition of the Solution

An advanced monitoring equipment system is established, featuring high-precision chemical ionization mass spectrometers, gas chromatographs, and other instruments distributed across key process areas such as wafer manufacturing, lithography, and etching to detect acidic, alkaline, organic, and metallic airborne molecular contaminants (AMC). A data collection and transmission module is also employed to gather real-time data from the monitoring equipment, which is stably transmitted to a data processing center via wired or wireless means. Additionally, a data analysis and management platform is used to organize, store, and analyze the collected data with specialized algorithms to track changes in pollutant concentration trends and distribution patterns, generating visual reports. An alert system promptly notifies relevant personnel when pollutant concentrations exceed preset thresholds, enabling swift action to adjust production environment purification parameters or process conditions. This comprehensive approach ensures that semiconductor production remains unaffected by AMC, safeguarding the yield and quality of chip manufacturing.

Application in the Industry

ChangXin Memory Technologies

Hefei Core Storage Electronic Ltd.