Industrial Testing Instruments
Vacuum Chamber Leak Detection System
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Vacuum Chamber Leak Detection System for Semiconductor Industry

  • Vacuum Chamber Leak Detection System for Semiconductor Industry
Vacuum Chamber Leak Detection System for Semiconductor Industry
+
Vacuum Chamber Leak Detection System for Semiconductor Industry
+
  • Vacuum Chamber Leak Detection System for Semiconductor Industry

Vacuum Chamber Leak Detection System for Semiconductor Industry

It is used for leak detection of electronic components/seals. The solution consists of a pressure helium tank, a leak detection tank and a helium mass spectrometer leak detector.
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Product advantages

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Core independence and self-controllability, full-chain demand customization.

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Intelligent human-machine interaction, effortless data management.

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Automatic loading/unloading and transmission, precise and rapid leak detection.

Product Details

Introductionb of Vacuum Chamber Helium Leak Detection System
It is used for leak detection of electronic components/seals. The solution consists of a pressure helium tank, a leak detection tank and a helium mass spectrometer leak detector.
Features of Vacuum Chamber Helium Leak Detection System
1. The unique gas circuit design improves the pumping speed of helium, shortens the background time of helium cleaning and effectively prevents helium pollution;
2. The minimum detectable leak rate is low, the sensitivity is high and the detection range can be up to Level 12;
3. Intelligent fault indication and alarm functions.
Composition of Vacuum Chamber Helium Leak Detection System
The solution is composed of a pressure helium tank, a leak detection tank and a helium mass spectrometer leak detector. The electronic components or seals are placed into the pressure helium tank, the helium gas of the specified concentration
Applications
Semiconductor industry, components/seals.

 

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